The oxidation furnace is set up for dry oxidation only (clean thermal oxidation - DRY) and therefore limited to oxide thickness of 200 nm. This makes it suitable for the fabrication of gate oxide in a ...

We then performed 400 virtual experiments comprising seven sources of process variation. Using this virtual fabrication technique, we were able to identify a minimum gate-to-source/drain spacer ...

Chemical vapor deposition also is a promising approach for scalable synthesis of 2D materials – but automated commercial systems can be cost prohibitive for some research groups and startup companies.

Researchers have developed a series of high-performance, GaN-based CMOS logic circuits, which all display the desired “CMOS-like” characteristics. They project that these circuits could cut ...