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This paper proposes the change of focus ring (FR) material from silicon (Si) to silicon carbide (SiC) to extend the lifetime of the oxide etch chamber. This is important because the lifetime extension ...

All the latest science news on crystal structure from Phys.org. Find the latest news, advancements, and breakthroughs.

As the structure of chabazite was proposed in the early days of crystal structure determination further investigation appeared desirable.

SiC MOSFETs are widely used as the core component in various power converter applications. To ensure a consistent performance and maximising the operation lifetime of SiC MOSFETs, their reliability is ...

Our results indicate that the TMC crystal morphology can be significantly altered by the local carbon source amount. Specifically, a low carbon concentration in the processing environment favors ...

As a semiconductor material with exceptional optoelectronic properties, ultrathin crystal silicon (c-Si) is widely applied to wearable electronics. However, ultrathin c-Si is highly susceptible to ...