Scientist uncovers physics behind plasma-etching process Date: January 27, 2017 Source: DOE/Princeton Plasma Physics Laboratory Summary: A team of physicists has uncovered some of the physics that ...

During the etching process, a piece of silicon is placed in a chamber and immersed within a thin layer of plasma, about two centimeters wide. Also within the plasma are two electrodes spaced a ...

Figure 4. Figure 4 shows time evolution of plasma and etch product species that takes place during a CF4 RIE process showing the effect of O2 addition on the etch rate. a. (top) Power: 400 W, 100 sccm ...

Back in 2006, University of California, Los Angeles (UCLA) engineer Patrick Pribyl had an idea for a better way to control the plasma used in chip manufacturing during the etching process.

Plasma Chemistry and Plasma Processing (2020). [3] Exploring the evolution of asymmetric pattern of mask hole during plasma etching process by particle simulation method. Results in Physics (2019).

Plasma etching process has gained huge attention as the most probable technology that could break the limits of conventional etching process. However, one of the major downsides of plasma etching is ...

Thus, it was desired to develop a non-plasma process that enables diamond etching at a high-rate. In this study, by focusing on the solid-solution reaction*6) of carbon into nickel, we have aimed ...

In the process of doing so, they discovered that with the right process applied to the right thickness and orientation of wood grain, the plasma treatment resulted in a surprisingly dark end result.

The project, entitled PolAR (reference 16/N0723), was funded by the Federal Ministry of Economics and Technology (BMWi) and aimed to develop a new, efficient, continuous roll-to-roll process for ...

Samsung's patent says that a dry etching apparatus using plasma is suitable for fabricating circuits with a width of 0.15 micrometers or less. The company concludes that dry etching is the ...

(Nanowerk News) Physicist Igor Kaganovich at the Department of Energy's (DOE) Princeton Plasma Physics Laboratory (PPPL) and collaborators have uncovered some of the physics that make possible the ...