The beam will eject source atoms towards the substrate which then deposit as a thin film. The high vacuum ensures near line-of-sight deposition leading to minimal sidewall coverage, which is ideal for ...

The choice of material directly influences the film's electrical, optical, and mechanical properties, thereby determining the functionality of the device. The applications of thin films are extensive ...

A microscopically thin layer of material that is deposited onto a metal, ceramic, semiconductor or plastic base. Typically less than one micron thick, thin films can be conductive or dielectric ...