Semiconductor process engineers would love to develop successful process recipes without the guesswork of repeated wafer testing. Unfortunately, developing a successful process can’t be done without ...

Supply chains are in flux and process operations need to be ready and able to adapt to both changing inputs and a need for ...

Yibo Zhao ¹, Yasuo Amemiya ², Ying Hung ¹, EFFICIENT GAUSSIAN PROCESS MODELING USING EXPERIMENTAL DESIGN-BASED SUBAGGING, Statistica Sinica, Vol. 28, No. 3 (July 2018), pp. 1459-1479 ...

Several applications of virtual process modeling and metrology are illustrated in 3D NAND, DRAM, and logic technology. These applications include studies of 3D NAND pillar etch alignment (including ...

PSE’s gPROMS is a unified equation-oriented process modeling environment for applications across the plant, from complex catalytic reaction and separation to wastewater treatment and utilities.