As a spot scanning device, the 29 kHz resonant type high-speed MEMS mirror was used. The MEMS mirror can scan at up to 76 frames per second, making it ideal for high-speed phenomena like Ca 2 ...

For the particular application of CVG's in cell phones, the oscillating mass is actually the vibrations of MEMS-sized beams along a radial line of the rotating phone. The vibrational motion transverse ...

A tiny mirror used to reflect beams of light in optical switches. See optical switch and MEMS. THIS DEFINITION IS FOR PERSONAL USE ONLY. All other reproduction requires permission.