FREMONT, Calif.–Asyst Technologies Inc. today unveiled its next-generation 300-mm load port product, which the company said breaks new ground in automated wafer handling for front-opening-unified-pod ...

CHELMSFORD, Mass.–Brooks Automation Inc. today (March 19) announced it has licensed key portions of its patented 300-mm front opening unified pod (FOUP) wafer loading port technology to Tokyo Electron ...