The concept of the laser-plasma source is similar to the technology used for tin laser-plasmas in EUV lithography. A pulsed infrared laser is focused into a jet of either methanol or liquid ...

ASML, the world's only maker of EUV lithography ... a laser-produced plasma (LPP) EUV source. An LPP EUV source comprises a ...

Figure 3: EUV sources for lithography applications based on laser- (left) or discharge-produced (right) plasmas of tin. In a laser-produced plasma source, a high-reflectivity ellipsoidal ...

Chinese electronics giant Huawei is testing elements for an extreme ultraviolet (EUV) lithography machine at its Dongguan facility ... They add that the equipment is based on a laser discharge induced ...